Generator Frequency: 80 kHz Power 1000 oder 3000W, All generators are continuously adjustable 0-100 %
Chamber volume: Approx. 150 l
Gas Connections: Mass Flow Controller (MFC)
Electrodes and Trays: Between one and ten trays / electrodes
Control: PCCE-control (Microsoft Windows CE) Power supply: 400 V / 3 Phases
Vacuum Pump: In different sizes and from various manufacturers (as required with activated carbon filter